![]() ![]() Cantilevers are often utilized as a probe in micro-force detection, atomic force microscope measurement, chemical or bio-sensing, and some accelerometers also adopt cantilevers to acquire high-G acceleration signals. ![]() Flat diaphragms with different geometry (e.g., square, circle and rectangle) and thickness (from several microns to hundreds of microns) can measure pressures from Pa to MPa with favorable sensitivity and dynamic response the bossed diaphragms provide the sensor with better linearity and overload resistance when used in ultra-high sensitive measurement of vacuum levele meanwhile, cross-beams, peninsula-islands and annular grooves are also incorporated into the flat or bossed diaphragms to further optimize the sensor features. Flat and bossed diaphragms are the most used schemes for pressure sensors. Single cantilever-mass structures, which appeared in the first monolithic microaccelerometers, feature good sensitivity but poor cross-axis immunity and dynamical response the dual cantilever-mass structure partly solves the latter problem by promoting the beam-perpendicular-direction stiffness subsequently, the double-supported-beam, quad-beam and cross-beam structures greatly enhance the primary and lateral stiffness, but diminish the sensitivity at the same time then, many improved sensing structures (e.g., multi-beam-mass, slotted-beam-mass, planner-beam, gapped-cantilever-beam etc.) are constructed to obtain better comprehensive characteristics considering the sensitivity, resonant frequency and cross-axis sensitivity. As the main geometrical configuration for accelerometers, the beam-mass structure can work smoothly by sensing the inertia force caused by the applied acceleration. To fulfill the demands from different applications, various classic structures for piezoresistive sensors, as shown in Figure 1, are proposed and proved to be high effective by practice. Until now, silicon piezoresistances have been utilized in the detection of various targets, including acceleration, pressure, micro force/torque, strain/stress, flow, biochemical interaction, fluid density and viscosity, surface topography, sonar vectors, etc. Piezoresistive sensors were one of the first developed microelectromechanical system (MEMS) devices and still display a significant growth prompted by the advancements in surface/bulk micromachining techniques and material technology.
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